In view of the problems existing in slope engineering monitoring, such as low monitoring accuracy, high cost and difficult field layout, the mountain displacement monitoring was taken as the main research object, a monitoring system based on MEMS micro electro mechanical monitoring technology was adopted, the advantages of MEMS acceleration sensor, such as high precision and small volume, were utilized, ZigBee with CC2530 as the core was used to establish wireless network transmission, and identify the possibility of landslide. The simulation experiment was designed according to the deformation process of landslide, the experimental results show that the MEMS sensor can accurately collect data, and the relative error of detection was less than 2%, and the whole system has low power consumption and fast speed, and can well complete the landslide detection.