基于MEMS技术的甲烷催化燃烧传感器研究进展

doi:10.19286/j.cnki.cci.2022.11.036

Abstract
Figure/Table
References (24)
Related Citation (15)

Download: PDF (0 KB) HTML (1 KB)
Export: BibTeX | EndNote (RIS)

Abstract

Catalytic combustion methane sensor is the most widely used sensor in coal mines. The catalytic combustion gas sensor has the advantages of simple manufacturing technology, low cost, and high accuracy and sensitivity for the detection of methane gas. However, the traditional catalytic combustion gas sensor is made by hand, resulting in difficult matching, poor consistency and high power consumption. With the development of intelligent internet of things and silicon micromachining technology，microelectromechanical system (MEMS) has becomes more mature. Compared with traditional sensors, it has the characteristics of small volume, light weight, low cost, low power consumption, good stability and automatic mass production. Many researchers began to develop and design combustible gas catalytic combustion sensor based on MEMS technology, and have made progress in the fabrication process and materials of sensor microstructure.

Key words： MEMS catalytic combustion sensor methane combustible gas sensor carrier catalysis element

	Service

	E-mail this article
	Add to my bookshelf
	Add to citation manager
	E-mail Alert
	RSS
	Articles by authors
	Liu Ni
	Shu Zhen
	Sui Ran
	Wang Tao
	Cao Zhen fang

Cite this article:

Liu Ni,Shu Zhen,Sui Ran等. Research progress of methane catalytic combustion sensor based on MEMS technology[J]. CCI, 2022, 45(11): 131-135，147..

URL:

http://www.mtyhg.com.cn/EN/10.19286/j.cnki.cci.2022.11.036 OR http://www.mtyhg.com.cn/EN/Y2022/V45/I11/131

1 ]       张轶群，于英硕，孙鉴波，等. 催化燃烧式甲烷传感器的催化剂担载方法和可靠性初探[ J ]. 计测技术，2010，30：124 - 126.
[ 2 ]       张光建，王立杰，汪文生. 矿井自然灾害隐患识别决策支持系统模型研究[ J ]. 中国煤炭，2005，31（ 2 ）：57 - 60.
[ 3 ]       陈俊英,林辉. 甲烷检测技术的研究现状 [ J ]. 现代仪器，2007（ 5 ）：1 - 3．
[ 4 ]       Ivanovskaya M, Kotsikau D, Faglia G, et al. Gas-sensitive propert-
ies of thin film heterojunction structures based on Fe2O3-In2O3 nanocompo-sites[ J ]. Sensors and Actuators B: Chemical, 2003, 93(1 - 3): 422 - 430.
[ 5 ]       李文江，胡    洋，李    涛. 基于红外技术的甲烷检测系统设计[ J ]. 煤矿安全，2008（ 11 ）：63 - 66.
[ 6 ]       Gao T, Wang T H. Synthesis and properties of multipod-shaped ZnO nanorods for gas-sensor applications [ J ]. Applied Physics A, 2005, 80( 7 ): 1 451 - 1 454.
[ 7 ]       丁黎明，赵景波. 催化燃烧型甲烷传感器的研究[ J ]. 微计算机信息，2007（ 1 ）：177 - 178.
[ 8 ]       李    珂，于世洁，尤政等. 基于MEMS技术的气体传感器 [ J ]. 传感器与微系统，2008，27（ 11 ）：5 - 7.
[ 9 ]     王淑华. MEMS传感器现状及应用[ J ]. 微纳电子技术，2011，48（ 8 ）：516 - 522.
[ 10 ]     马    丽，宋宏斌，王    磊，等. 基于MEMS技术的催化燃烧气体传感器[ J ]. 现代信息科技，2018，2（ 10 ）：179 - 181.
[ 11 ]     Chen Q, Dong H, Xia S. A novel micro-pellistor based on nanopo-
rous alumina beam support [ J ]. Journal of Electronics (China), 2012, 29( 5 ): 469 - 472.
[ 12 ]     Miklós A, Hess P, Bozóki Z. Application of acoustic resonators in photoacoustic trace gas analysis and metrology [ J ]. Review of scientific instruments, 2001, 72( 4 ): 1 937 - 1 955.
[ 13 ]     Brauns E, Morsbach E, Kunz S, et al. Temperature modulation of a catalytic gas sensor [ J ]. Sensors, 2014, 14( 11 ): 20 372 - 20 381.
[ 14 ]     谷俊涛，张永德，姜金刚，等. 三明治双桥微结构催化燃烧式气体传感器的设计与实现[ J ]. 仪器仪表学报，2014，35（ 2 ）：350 - 369.
[ 15 ]     Lee E B, Hwang I S, Cha J H, et al. Micromachined catalytic com-
bustible hydrogen gas sensor [ J ]. Sensors and Actuators B: Chemical, 2011, 153( 2 ): 392 - 397.
[ 16 ]     Suehle J S, Cavicchi R E, Gaitan M, et al. Tin oxide gas sensor fa-
bricated using CMOS micro-hotplates and in-situ processing [ J ]. IEEE Electron Device Letters, 1993, 14( 3 ): 118 - 120.
[ 17 ]     余    隽，唐祯安，陈正豪，等. 基于硅微加工工艺的微热板传热分析[ J ]. 半导体学报，2005，26（ 1 ）：192 - 196.
[ 18 ]     刘丽丽，王连元，郭    欣，等. 微气体传感器微热板电极结构的设计与优化[ J ]. 电子元件与材料，2014，33（ 9 ）：50 - 53.
[ 19 ]     Lee S M, Dyer D C, Gardner J W. Design and optimisation of a high-temperature silicon micro-hotplate for nanoporouspalladium pellistors[ J ]. Microelectronics Journal, 2003, 34( 2 ):               115 - 126.
[ 20 ]     Nagai D, Nishibori M, Itoh T, et al. Ppm level methane detection using micro-thermoelectric gas sensors with Pd/Al2O3 combustion catalyst films [ J ]. Sensors and Actuators B: Chemical, 2015, 206: 488 - 494.
[ 21 ]     Li Z, Li J, Wu X, et al. Methane sensor based on nanocomposite of palladium/multi-walled carbon nanotubes grafted with 1, 6-hexanediamine [ J ]. Sensors and Actuators B: chemical, 2009, 139( 2 ): 453 - 459.
[ 22 ]     Kamijo T, Suzuki Y, Kasagi N, et al. High-temperature micro catalytic combustor with Pd/nano-porous alumina [ J ]. Proceedings of the Combustion Institute, 2009, 32( 2 ): 3 019 - 3 026.
[ 23 ]     Roth D, Gélin P, Primet M, et al. Catalytic behaviour of Cl-free and Cl-containing Pd/Al2O3 catalysts in the total oxidation of methane at low temperature[ J ]. Applied Catalysis A: General, 2000, 203( 1 ): 37 - 45.
[ 24 ]     Pieck C L, Vera C R, Peirotti E M, et al. Effect of water vapor on the activity of Pt-Pd/Al2O3 catalysts for methane combustion[ J ]. Applied Catalysis A: General, 2002, 226(1 - 2): 281 - 291.