In order to explore the treatment effect of volatile organic compounds(VOCs) in the waste gas treatment device, the VOCs samples collected by Suma tank at both ends of the treatment device were qualitatively and quantitatively analyzed by gas chromatography-mass spectrometry, and a new detection method was established. The results showed that a total of 50 kinds of VOCs were detected in the exhaust gas, including 4 kinds of alkanes, 9 kinds of aromatic hydrocarbons, 6 kinds of oxygenic volatile organic compounds, 17 kinds of halogenated alkanes, 9 kinds of halogenated olefin and 5 kinds of halogenated aromatic hydrocarbons. The mass concentrations before degradation were 23.16, 207.87, 1 435.54, 1 409.28, 14.58 and 17.11 μg/m3 respectively. The mass concentrations after degradation were 15.24, 200.39, 459.19, 371.86, 7.43 and 7.77 μg/m3 respectively. The degradation efficiencies were 34.22%, 3.60%, 68.01%, 73.61%, 49.07%, and 54.60% respectively. At the same time, there are 6 VOCs characteristic components obtained by monitoring, which are acetone, chloromethane, dichloromethane, 4-ethyltoluene, chloroethane and toluene respectively. The mass concentration before and after degradation accounts for 93.37% and 84.45% of the total VOCs, respectively. Therefore, it is necessary to pay attention to these VOCs.